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Article Dans Une Revue Surface and Coatings Technology Année : 2018

Flexible PZT thin film transferred on polymer substrate

Résumé

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O3 (PZT), thin films have been realized by an all chemical process on a plastic substrate. The procedure is composed of three steps: the first one is the PZT deposition on aluminium thin substrate, the second step corresponds to the bonding PZT thin film to a polymer layer and the final step is the aluminium substrate etching. Diffractions and microscopy techniques were used to check the quality of the new PZT/polymer composite structure. Polarization hysteresis and permittivity measurements were also performed to determine the electrical characteristics of the composite. These results demonstrate that the recently developed PZT/polymer thin films are very attractive for both bending actuation and sensing as well as for low frequency vibrating energy harvesting applications.
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hal-01757003 , version 1 (02-03-2020)

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Thibault Dufay, Benoit Guiffard, Raynald Seveno, Stéphane Ginestar, Jean-Christophe Thomas. Flexible PZT thin film transferred on polymer substrate. Surface and Coatings Technology, 2018, 343, pp.148-152. ⟨10.1016/j.surfcoat.2017.09.080⟩. ⟨hal-01757003⟩
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