Secondary electron emission of an insulating target bombarded by a defocused electron beam
Résumé
We study the secondary electron emission of an insulating target submitted to an electron beam. It depends on the characteristics of the primary beam and on the sample. For insulators, because of the progressive establishment of a charge, the yield varies all along the bombardment. The present paper tries to clarify the role played by the traps properties on the electron emission. For that, we use a Monte Carlo simulation for the implantation of electrons. In this work, we have limited our study to the case of a broad electron primary beam (defocused mode).Our simulation enables us to better understand the dynamics of the system in charge. When the traps are shallow, transport effects are important. Moreover, for a thin target, a current appears, corresponding to the evacuation of charge towards the rear electrode.